The preparation process of silane: a breakthrough from laboratory to industrialization
The preparation methods of silane include gas-phase method, liquid-phase method, and disproportionation reaction method, among which the most mature industrial application is the silicon alloy decomposition method:


Silicon alloy decomposition method: Mg ₂ Si reacts with NH ₄ Cl in liquid ammonia to produce silane, which has good boron removal effect and relatively safe production. However, it consumes a large amount of raw materials and has high costs. Currently, it is only used by Komatsu Company in Japan.
SiCl ₄ hydrogenation method: producing silane through hydrogenation reduction of silicon chloride compounds, suitable for large-scale production.
Disputation reaction method: using chlorosilanes (such as SiHCl ∝, SiH ₂ Cl ₂) to undergo redistribution of chlorine and hydrogen atoms under the action of a catalyst, generating silane. This method uses low-temperature distillation to remove low boiling point products (such as SiH ₂ Cl ₂), breaking the reaction equilibrium and increasing the yield of silane.
Technological progress: The anti disproportionation process can recover over 95% of SiH ₂ Cl ₂, reducing the production cost of polycrystalline silicon, but the problem of phosphorus compound impurity deposition needs to be solved.